Gas injectors available custom designed for your system.  We can calculate the  hole angle pattern for your system geometry to optimize uniformity across the wafer.
Pyro port CBr4 injector
  • Concentric tube design allows clear optical access through center of source
  • Add CBr4 to a Gen 2 system without giving up a source port
  • Compatible with pyrometry, band edge thermometry, and other optical techniques
  • Provides uniform flux distribution across wafer