Gas injectors available custom designed for your system. We can calculate the hole angle pattern for your system geometry to optimize uniformity across the wafer.
Pyro port CBr4 injector
- Concentric tube design allows clear optical access through center of source
- Add CBr4 to a Gen 2 system without giving up a source port
- Compatible with pyrometry, band edge thermometry, and other optical techniques
- Provides uniform flux distribution across wafer