The Veeco┬« phosphorous valved cracker source evaporates P from an air cooled “white zone”. Typically, subtle variations in the ambient temperature, compressed air pressure, or compressed air temperature cause the white zone temperature to drift a degree or two during a growth run. Our white zone temperature controller adjusts the airflow to maintain a constant tempeature to within +- 0.1 degree C of the desired setpoint. The controller additionally provides the ability to monitor and control the white zone temperature from any growth control software.

The data below shows the dramatic improvement in stability with our closed loop variable flow system.